• Mechanical Engineering
  • Electric/ Electronic/ Communications Engineering
  • Computer Sciences
  • Chemistry
  • Physics
  • Mathematics
  • Industrial And Management Engineering
  • Civil Engineering/ Construction/ Environmental Engineering
  • Energy/ Resource Engineering
  • Other
  • Power Systems
  • Industry & Distribution
  • Water Systems
  • Urban Planning & Development Systems
  • Rail Systems
  • Financial Information Systems
  • Government & Public Corporation Information Systems
  • Information & Telecommunication Systems
  • Healthcare Systems
  • Home Appliances
  • Automotive Systems
  • Electronic Devices
  • Research and Development
  • Product Development
  • System Engineer (SE)
  • Manufacturing Engineer
  • Quality Assurance
  • Technical Sales
  • Intellectual Property Management
  • Other


Becoming a Global Leader in High-Tech Solutions

Hitachi High-Technologies Corporation was formed in October 2001 through the merger of Hitachi's instrumentation group and semiconductor manufacturing equipment group with Nissei Sangyo Co., Ltd., a trading company that dealt in high-technology products. This created an integrated organization working in the field of nanotechnology and able to handle everything from development through to production, sales, and service. Based on its slogan - "the leading-edge at the front line" - Hitachi High-Technologies Corporation supplies today's leadingedge technology to the world's leading users at the front line of progress. The technologies and products supplied by the company represent an amalgamation from a variety of different technology sectors. We provide opportunities for engineers with a diverse range of backgrounds in fields like mechanical engineering, electrical engineering, electronics engineering, IT, physics, chemistry, and biology, and are actively seeking people who are possessed of a spirit of curiosity and the MONOZUKURI manufacturing ethos.

Becoming a Global Leader in High-Tech Solutions


  • Semiconductor measurement and testing equipment

    On the cutting edge of electronic device manufacturing that meets the needs of further miniaturization and energy efficiency, we provide a proprietary product line-up of semiconductor measurement and inspection devices. Through joint research and development with semiconductor manufacturers, we offer world class solutions such as our flagship CD measurement SEM products that boast a worldwide top market share.
    ECD SEM

    Semiconductor measurement and testing equipment
  • Semiconductor manufacturing equipment

    On the basis of the strategy of maximizing value for customers by constantly pursuing leading-edge technology, our policy is to become a segment leader through selection and focusing on the etching business, and the timely development and market introduction of products in new businesses.
    EEtching equipment

    Semiconductor manufacturing equipment
  • Electron microscopes

    Advanced analysis equipment which serves a wide range of environmental and industrial fields. Hitachi High-Technologies electron microscopes, such as SEMs and TEMs contribute to the development of cutting-edge scientific technologies in fields such as new materials development and bio-technologies research, etc.
    EElectron microscopes (SEMs, TEMs)
    EFocused ion-beam milling/monitoring systems, etc.

    Electron microscopes
  • Life science, mass spectrometer field

    The first automated clinical analyzer in the world to incorporate immunoassay functions into a biochemical analyzer. Our automated blood analysis system is now an essential component for the health management of people throughout the world and for the early detection of a variety of diseases. Our DNA sequencers, which have contributed to dramatic developments in bio-technologies in recent years, are now opening up new opportunities such as tailor-made medical care and drug development.
    EAutomated analyzers for clinical examination
    EPre-analytical process automation systems
    EDNA sequencers
    EMass spectrometers (LC-MS, GC-MS), etc.

    Life science, mass spectrometer field
  • Design and manufacturing solutions field

    This is a type of occupation that crosses each product field. There is a field that promotes digital engineering and reforms the developing process, a common design field that develops the built-in control system for products, and a field that develops the processing technique and automation technology for manufacturing products and designs and rationalizes the production line, building a stable corporate foundation from design to manufacturing.

    Design and manufacturing solutions field


  • Research and Design Development

    In R&D and design development field, there are electron beam/ion-beam application products, semiconductor measurement/testing systems, life sciences (bio/medical) related products (Naka Division) and plasma etching equipment for semiconductor manufacture (Kasado Division). There are four fields: the mechanical field (mechatronics), electric circuit field, software field, and analysis field.

  • Quality Assurance

    Quality assurance is ultimately responsible for products and systems delivered to our customers. In order to secure the functions, quality and reliability of our products, we implement prototype certification and release testing of products in cooperation with the design and manufacturing fields.

  • Manufacturing engineer

    We create a variety of systems for design, operation, maintenance and efficiency improvement of production lines at our factories. We develop cross-product and cross-cutting technologies and carry out facility management that supports the MONOZUKURI of manufacturing sites.


Electron Beam, optical technology and plasma control technology-widespread, through numerous fields

Products based on Hitachi High-Technologies core electron beam and optical technologies, including products with a vital role at the front line of the healthcare industry, are actively being developed. These include electron beam technology used in electron microscopes and various other testing and analysis instruments, the ultrafine precision machining technology that underpins spectroscopy, high-density energy machining techniques that use electron or ion beams, image processing technologies for applications such as pattern recognition or the detection and classification of microscopic defects on semiconductor wafers, sensing technologies used in automatic blood analyzers with built-in diffraction grids, and mass spectrometry techniques with uses that include glycan analysis and the determining of protein structure.
Meanwhile, Hitachi High-Technologies plasma control technologies support the next generation of LSI fabrication, which involves not only greater miniaturization but also an increasingly diverse range of materials and structures. These core technologies that characterize Hitachi High-Technologies are highly regarded as world-leading, and are essential to researchers and engineers engaged in development work.

[Semiconductor measurement and testing equipment] Advanced High Resolution CD-SEM(CG6300)

The CG6300 has achieved the highest resolution, as well as the highest accuracy and reproducibility of measurement, in the history of Hitachi CD-SEMs. Beyond its superior basic performance, however, it is equipped with a high precision process monitor and offline recipe processing function, to improve overall productivity. It is with great pride that we deliver this CD-SEM, worthy of our customer's trust. Holding the world's top market share is a testament to our commitment to innovation, as well as our visionary perspective on the future.

[Semiconductor measurement and testing equipment]
Advanced High Resolution CD-SEM(CG6300)

[Semiconductor measurement and testing equipment] Optical wafer inspection machines (LS9300)

Development of this optical wafer surface inspection system was initiated in the late 1970s, and our continuing effort to achieve ever greater sensitivity has resulted in the system becoming one of our longest-selling products. In 2005, we commenced the development of the LS9000 series, which offers a new type of wafer surface inspection system for post-32 nm generation chips. With its unprecedented sensitivity, the LS9300 has already acquired a high reputation, confirmed by a Technology Innovation Award.

[Semiconductor measurement and testing equipment]
Optical wafer inspection machines (LS9300)

[Semiconductor manufacturing equipment field] Plasma etching machines (M-9000)

These dry etching machines perform microfabrication of semiconductor devices using reaction gas and ions in a plasma. They are used to form gates, wiring, and interlayer insulating films on the latest LSIs produced with 32-nm node or finer levels of miniaturization.
They have a reputation for high reliability and high-precision processing.

[Semiconductor manufacturing equipment field]
Plasma etching machines (M-9000)

[Electron microscopes] Ultra-high Resolution FE-SEM (SU9000)

Nanomorphological observations are essential to the development of nanoparticle-based advanced materials. Hitachi High-Technologies has been working on the development of a scanning electron microscope (SEM) that can routinely achieve subnanometer resolution. Combining advanced technologies with experienced craftsmanship, the SU9000 breaks new ground in the application of cutting-edge technology for the next generation.
Its preeminent performance, a function of its unparalleled specifications, makes it fully deserving of its highest-end status.

[Electron microscopes]
Ultra-high Resolution FE-SEM (SU9000)

[Electron microscopes] Transmission electron microscope (HT7700)

This model has been developed with optimal digital image detectors arranged at optimal positions, ensuring a comfortable and effective operational environment. Observations are made with a real-time digital camera with greater sensitivity than that of the human eye. As images are recorded in digital format, they are easier to incorporate into an image database, and to analyze, adjust, process, and use in creating microscope functions such as auto focus or auto image acquisition. Electron optics was designed to meet a wide variety of requirements in the fields of biology, pathology, anatomy, nano technology, and soft materials science.

[Electron microscopes]
Transmission electron microscope (HT7700)

[Life science (bio, medical), mass spectrometer field] Automatic blood analysis machine for clinical testing (LABOSPECT 008 ƒ¿)

Hitachi's first clinical automatic chemistry analyzer arrived on the market in 1970. Since then, Hitachi Ltd., and Hitachi High-Technologies as its successor, has been advancing the technology. In the continuous pursuit of our goal of improving patient care, we are responding to the needs of medical services for improved quality of inspection data. Our LABOSPECT 008 ƒ¿ has been developed in order to reduce operators' operational work by improving the efficiency of examination work, in addition to expediting examinations.

[Life science (bio, medical), mass spectrometer field]
Automatic blood analysis machine for clinical testing
(LABOSPECT 008 ƒ¿)

[Life science (bio, medical), mass spectrometer field] Immunoassay module (e602)

Roche Ltd. is a globally recognized brand in the field of health care, and its cobas 8000 system e602 immunoassay module utilizes our technologies. The e602 is a measurement module based on electrochemiluminescence technology, with a capacity of 25 reagent packs. The module has a throughput of up to 170 tests/hour, and up to four modules can be configured into the cobas 8000 system, enabling exceptionally rapid processing of samples.

[Life science (bio, medical), mass spectrometer field]
Immunoassay module (e602)


To the spreading global market

Hitachi High-Technologies has a vision of becoming a global leader in high-tech solutions. With locations in 25 countries and regions outside Japan, sales outside Japan account for more than 60% of the total. This worldwide network of operations provides numerous opportunities for coming into contact with the world's latest technologies, allowing us to work closely with customers and quickly identify global needs. We leverage these features to help create value for global society.

To the spreading global market

Responsibility for quality, with involvement from the design stage

The mission of the quality assurance department is to satisfy customers expectations. This is a shared stance that applies across all the different cultures and ways of thinking around the world. The company works on the basis of a separation of responsibilities between design, manufacturing, and quality assurance, with quality assurance being responsible for the products and services that are delivered to customers. To fulfill this responsibility, we conduct quality checks right back to the design stage.

Responsibility for quality,
with involvement from the design stage


Corporate Profile

¡Representative Director, President & CEO
Masahiro Miyazaki

April 12, 1947 (Merger and company name change: October 1, 2001)

7.93848 billion yen (as of March 31, 2018)


  • Naka Division

    Naka Division

    882 Ichige, Hitachinaka-shi, Ibaraki, 312-8504, Japan

  • Kasado Division

    Kasado Division

    794 Higashitoyoi, Kudamatsu-shi, Yamaguchi, 744-0002, Japan

Photo album

  • Naka Division

    Naka Division

    The Naka Division has accumulated a variety of technologies to produce new products on a daily basis, including the core technologies of electron beams and optics. The Division produces a diverse range of sophisticated products, ranging from semiconductor devices to medical care and bio-technology, and supplies them worldwide.
    The Naka Division has established the Science Laboratory, which combines a laboratory with demonstration functions, and the Tokyo Solution Lab in the metropolitan area where transportation access is good.

  • Kasado Division

    Kasado Division

    The Kasado Division focuses on plasma etching devices for semiconductor and magnetic head manufacturing by using plasma, micro-wave, and ultraprecision machining technologies.
    The electronic Customer Support (e-CS) Center has installed the latest devices in an ultra-clean (class 10) demonstration room to support customers.


Number of employees [Consolidated] 10,898 employees@[Company] 3,964 employees (as of March 31, 2018)
Selling point Semiconductor process control system (CD-SEM), electron microscope (FE-SEM), medical product (biochemical autoanalysis system), and biotechnology product (DNA sequencer) have some of the largest global shares.

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